The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[16a-1A-1~11] 15.6 Group IV Compound Semiconductors (SiC)

Wed. Sep 16, 2015 9:00 AM - 12:00 PM 1A (131+132)

座長:土方 泰斗(埼玉大)

9:00 AM - 9:15 AM

[16a-1A-1] Evaluation of Electronic States of Thermally-grown SiO2/4H-SiC

〇Hiromasa Watanabe1, Ohta Akio1, Makihara Katsunori1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:XPS,Oxide