[16a-2F-1~12] 3.14 Optical control devices and optical fibers

[16a-2F-8] Thermal Stability of a-Si:D/SiN_x Optical Multilayer Filter

〇Hidehiko Yoda¹, Takuma Tamura¹ (1.Utsunomiya Univ.)

Keywords:Tunable optical wavelength filter,Thermo optic effect,Silicon Nitride

We've fabricated a-Si:D/SiN_x tunable wavelength BPF and experimetally evaluated its thermal stability. We demonstrated that the absorption of the BPF did not increase up to 450 ^oC by using SiNx film,