[16a-2U-1~12] 6.6 Probe Microscopy

[16a-2U-1] Subsurface visualization of soft matrix using 3D-spectroscopic atomic force acoustic microscopy

〇Kuniko Kimura¹, Kei Kobayashi², Atsushi Yao¹, Hirofumi Yamada¹ (1.Dept. Elec. Sci. Eng. , Kyoto Univ., 2.The Hakubi Center for Adv. Res., Kyoto Univ.)

Keywords:scanning probe microscopy,atomic force acoustic microscopy,subsurface

We visualized subsurface Au nanoparticles (D: 50 nm) buried in polymer matrix under 900 nm from the surface using atomic force acoustic microscopy (AFAM) and heterodyne force microscopy (HFM). However, from these results, it is difficult to elucidate the origin of the subsurface visualization, because these methods bring information only at one fixed frequency. Here, we propose a new method named 3D-spectroscopic AFAM, where the viscoelastic spectrum is in situ measured on every pixel in the AFM tip scan area. We discuss the origin of subsurface visualization in detail using the results obtained by this method.