10:30 AM - 10:45 AM
△ [16a-2U-7] Control of thermal vibration of a micro silicon cantilever using a PZT actuator
Keywords:micro cantilever,thermal vibration,Michelson interferometer
Recently, micro mechanical structures are used in various types of sensors such as accelerometers, oscillation gyroscopes and scanning probe microscopes. In these measurement, thermal vibration of the micro mechanical structures could determine the limitation of measurement. In order to remove this limitation, we started the sturdy on controlling the thermal vibration of the micro silicon cantilevers using inertial force generated by the PZT driving of the micro cantilever. Amplitude the vibration of the micro cantilever was measured by a Michelson interferometer and analyzed by a FFT analyzer. The amplitude of the thermal vibration of the micro cantilever was measured to be about 50 pm, which is in agreement with the theoretical value. It has been successfully dumped down to less than 1 pm by feedback control of the amplitude.