[16a-2W-1~13] 2.3 Application, radiation generators, new technology

[16a-2W-2] Development of a uniform-irradiation system of swift-heavy ions for manufacture of sensor chips

〇Makoto Fujimaki¹, Masao Sataka², Makoto Matsuda² (1.AIST, 2.JAEA)

Keywords:Sensor,Biosensor,latent track

A waveguide-mode sensor is capable of detecting modifications in the dielectric environment near the waveguide surface and can be a highly-sensitive molecular detection sensor. A sensor chip of the sensor consists of a SiO₂ glass substrate, a Si layer, and a SiO₂ layer. It was reported that the sensitivity of the sensor could be enhanced by perforating the SiO₂ layer. One of the most promising perforation methods that can be used for mass-production is a selective etching of latent tracks formed by swift heavy ion irradiation. In the present research, to realize the mass-production of the perforated sensor chip, we established an ion irradiation process that can irradiate swift heavy ions in large area uniformly.