[16a-4A-1~9] 9.3 Nanoelectronics

[16a-4A-6] Fabrication of Single Molecule-Sized Nanogap Electrodes Using Metalmask Patterning

〇Yasuhisa Naitoh¹, Wei Qingshuo², Takao Ishida² (1.NeRI-AIST, 2.NMRI-AIST)

Keywords:nanogap,electromigration,evaporation

This study investigate sub-1-nm gap electrodes fabrications using metalmask patterning. The author present the details of the fabrication and the results of conductivity mesurements of molacular wires using the electrodes.