[16p-2Q-1~13] 8.3 deposition of thin film and surface treatment

[16p-2Q-12] Evaluation of plasma uniformity with wafer type plasma indicator

〇YU YAMAKAWA¹, KEITA HISHIKAWA¹, HIROKAZU MIYAZAKI¹, KEIKO NAKAMURA¹, KAZUHIRO UNEYAMA¹ (1.Sakura Color Products Corp.)

Keywords:plasma,indicator,uniformity