[16p-4E-1~11] 7.3 Micro/Nano patterning and fabrication

[16p-4E-10] Double nanoimprint-graphoepitaxy for localized liquid crystalline molecular orientation

〇Makoto Okada¹, Yusuke Taniguchi², Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

Keywords:Nanoimprint,Liquid cristal

We call the nanoimprint process for inducing the molecular orientation "nanoimprint-graphoepitaxy". The nanoimprint process can be carried out an imprinted pattern. This means that the molecular orientation may twice occur by double nanoimprint-graphoepitaxy. In this work, to advance molecular orientation technique by nanoimprint-graphoepitaxy, we demonstrated the double nanoimprint-graphoepitaxy for photo-cross-linkable liquid crystalline polymer and evaluated the molecular orientation of the fabricated pattern.