The 62nd JSAP Spring Meeting, 2015

Exhibitors' information

[T-3] HTL Co. Japan Ltd.

Atomic Layer Deposition Tools/ GEMStar XT/XT-P Arradiance, Inc. USA : Benchtop ALD platform. Possible deposition on 4”, 6”, 8” wafers and structures of height up to 30mm. , Pulse Laser Deposition Tools/ SolMateS b.v. The Netherlands Products Line Up of Integrated PLD platform SIP700/1200 for commercial production and Modular Platform SMP700/800 for R&D. , Photo-Curable Nanoimprint Resist/ Micro Resist Technology GmbH Germany. , Photo-Curable Resist/ mr-NIL210XP is suitable for PDMS(Poly DiMethyl Siloxane)soft stamp material.
  • Address

    190-0012
    東京都立川市曙町2-16-6 テクノビル3階

  • Tel

    042-523-2871

  • Fax

    042-523-2803

  • Web site, SNS

    http://www.htlco.co.jp/