Exhibitors' information
[T-3] HTL Co. Japan Ltd.
Atomic Layer Deposition Tools/ GEMStar XT/XT-P Arradiance, Inc. USA : Benchtop ALD platform. Possible deposition on 4”, 6”, 8” wafers and structures of height up to 30mm. , Pulse Laser Deposition Tools/ SolMateS b.v. The Netherlands Products Line Up of Integrated PLD platform SIP700/1200 for commercial production and Modular Platform SMP700/800 for R&D. , Photo-Curable Nanoimprint Resist/ Micro Resist Technology GmbH Germany. , Photo-Curable Resist/ mr-NIL210XP is suitable for PDMS(Poly DiMethyl Siloxane)soft stamp material.
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東京都立川市曙町2-16-6 テクノビル3階 -
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042-523-2871
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Fax
042-523-2803
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Web site, SNS