The 62nd JSAP Spring Meeting, 2015

Exhibitors' information

[T-1] CRESTEC CORPORATION

Crestec has introduced its new model, the CABL-UH series which has realized world highest level acceleration voltage 130kV. We will also present our highly-estimated Electron Beam Lithography System CABL-9000C. This model has realized a beam spot size 2nm, the finest line width 536 mm and a stitching accuracy 10 nm.
  • Address

    192-0045
    東京都八王子市大和田町1-9-2

  • Tel

    042-660-1190

  • Fax

    042-660-1198

  • Web site, SNS

    http://www.crestec8.co.jp/