2:00 PM - 2:15 PM
〇Yasuaki Sakakibara1, Yoshiyuki Kikuchi1, 2, Seiji Samukawa2 (1.Tokyo Electron, 2.Tohoku Univ.)
Oral presentation
8 Plasma Electronics » 8.2 Plasma measurements and diagnostics
Wed. Mar 11, 2015 2:00 PM - 6:00 PM A27 (6A-202)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
2:00 PM - 2:15 PM
〇Yasuaki Sakakibara1, Yoshiyuki Kikuchi1, 2, Seiji Samukawa2 (1.Tokyo Electron, 2.Tohoku Univ.)
2:15 PM - 2:30 PM
〇Makoto Matsui1, Morita Ryo1 (1.Shizuoka Univ.)
2:30 PM - 2:45 PM
〇Shusuke Nishiyama1, Huimin Wang1, Koichi Sasaki1 (1.Hokkaido Univ.)
2:45 PM - 3:00 PM
〇(D)HAO TAN1, Atsushi Nezu1, Haruaki Matsuura1, Hiroshi Akatsuka1 (1.Titech)
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