The 62nd JSAP Spring Meeting, 2015

Session information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Break (3:30 PM - 3:45 PM)

3:45 PM - 4:00 PM

〇Yusuke Nishimura1, Ryuhei Hayashi1, Hirokazu Nakazawa1, Makoto Ishida1, Kazuaki Sawada1, Hiromu Ishii1, Katsuyuki Machida2, 3, Kazuyuki Masu2, Changle Wang4, Ken-ichiro Iida4, Mitsumasa Saito4, Shinichi Yoshida4 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst. of Technology, 3.NTT-AT, 4.Graduate School of Medical Sciences, Kyusyu Univ,.)

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