9:00 AM - 9:15 AM
〇Tatsuya Okada1, Seita Kamimura1, Takashi Noguchi1 (1.Univ. Ryukyus)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:00 AM - 9:15 AM
〇Tatsuya Okada1, Seita Kamimura1, Takashi Noguchi1 (1.Univ. Ryukyus)
9:15 AM - 9:30 AM
〇Tomohide Wakasugi1, Takuya Ashitomi1, Tatsuya Okada1, Takashi Noguchi1, Osamu Nishikata2, Atsushi Ota2, Kazuhisa Inoue3, Kazuo Yamada3 (1.Ryukyus Univ., 2.ULVAC Inc., 3.Products-support Co. Ltd)
9:30 AM - 9:45 AM
〇Shohei Hayashi1, 2, Seiji Morisaki1, Shogo Yamamoto1, Taichi Nakatani1, Ryota Shin1, Seiichiro Higashi1 (1.Grad. School of AdSM, Hiroshima Univ., 2.JSPS Research Fellow PD)
9:45 AM - 10:00 AM
〇(D)Seiji Morisaki1, Shohei Hayashi1, Shogo Yamamoto1, Taichi Nakatani1, Takuya Kasahara1, Seiichiro Higashi1 (1.Grad. School of AdSM, Hiroshima Univ.)
10:00 AM - 10:15 AM
〇Taizoh Sadoh1, Jonghyeok Park1, 2, Rikuta Aoki1, Masanobu Miyao1 (1.Kyushu Univ., 2.JSPS)
Break (10:15 AM - 10:30 AM)
10:30 AM - 10:45 AM
〇Toshinari Watanabe1, Yasuhisa Oana2, Yoshitake Toda3, Naomichi Miyakawa1, Kaoru Furuta2, Hideya Kumomi3, Hideo Hosono3 (1.ASAHI GLASS, 2.LG Display, 3.TITech)
10:45 AM - 11:00 AM
〇Yasuhisa Oana1, Toshinari Watanabe2, Toda Yoshitake3, Naomichi Miyakawa2, Kaoru Furuta1, Hideya Kumomi3, Hideo Hosono3 (1.LG Display, 2.Asahi Glass, 3.TITech)
11:00 AM - 11:15 AM
Kota Nakao1, 〇(M2)Charith Jayanada Koswaththage1, Tomohide Wakasugi1, Tatsuya Okada1, Takashi Noguchi1 (1.Univ. of the Ryukyus)
11:15 AM - 11:30 AM
〇Kohei Sakaike1, 2, Akitoshi Nakagawa1, Muneki Akazawa1, Seiichiro Higashi1, 3 (1.Hiroshima Univ., 2.JSPS Research Fellow PD, 3.RNBS, Hiroshima Univ.)
11:30 AM - 11:45 AM
〇Taichi Nakatani1, Shohei Hayashi1, Seiji Morisaki1, Shogo Yamamoto1, Seiichiro Higashi1 (1.Hiroshima Univ.)
11:45 AM - 12:00 PM
〇Yoshiki Kamata1, Masahiro Koike1, Etsuo Kurosawa1, Masashi Kurosawa2, 3, Hiroyuki Ota1, Osamu Nakatsuka2, Shigeaki Zaima2, Tsutomu Tezuka1 (1.GNC-AIST, 2.Nagoya Univ., 3.JSPS)
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