Session information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[13p-A28-1~10] 8.1 Plasma production and control

Fri. Mar 13, 2015 4:30 PM - 7:00 PM A28 (6A-203)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

+Add all to schedule

4:30 PM - 4:45 PM

[13p-A28-1] ECR plasma sputtering apparatus partially substituting waveguides with coaxial cables

〇Housei Akazawa¹, Toshiro Ono² (1.NTT DIC, 2.Hirosaki Univ.)

4:45 PM - 5:00 PM

[13p-A28-2] Development of Photoresist Removal Process Using Microwave Excited Bubble Plasma in Water with Si Slot Antenna

〇Takuya Itou¹, Ishijima Tatsuo¹, Tanaka Yasunori¹, Uesugi Yoshihiko¹, Nishiyama Takashi², Horibe Hideo² (1.Kanazawa Univ., 2.Osaka city Univ.)

5:00 PM - 5:15 PM

[13p-A28-3] Improvement of electrodes for increasing various ion beam currents extracted from ECRIS

〇Youta Imai¹, Sho Kumakura¹, Takuya Nishiokada¹, Tomoki Nagaya¹, Shogo Hagino¹, Kazuki Ueda¹, Masayuki Muramatsu², Fuminobu Sato¹, Yushi Kato¹, Atsushi Kitagawa², Toshiyuki Iida¹ (1.Osaka Grad. Univ., 2.NIRS.)

5:15 PM - 5:30 PM

[13p-A28-4] Observing light emission from ECR multi-charged ion source plasma and considering its resonance phenomena

〇Takuya Nishiokada¹, Yota Imai¹, Sho Kumakura¹, Tomoki Nagaya¹, Kazuki Ueda¹, Shogo Hagino¹, Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (1.Osaka Univ.)

5:30 PM - 5:45 PM

[13p-A28-5] Spatial Distribution of Electron Energy Distribution Function along to Field Lines on ECRIS

〇Sho Kumakura¹, Youta Imai¹, Tomoki Nagaya¹, Takuya Nishiokada¹, Kazuki Ueda¹, Shogo Hagino¹, Fuminobu Sato¹, Yushi Kato¹, Tosiyuki Iida¹ (1.Osaka Univ.)

5:45 PM - 6:00 PM

[13p-A28-6] Beam transport from the 1st to the 2nd stage and effect to the 1st stage plasma on the tandem type ECRIS by evaporation source installation

〇Tomoki Nagaya¹, Yota Imai¹, Sho Kumakura¹, Takuya Nishiokada¹, Kazuki Ueda¹, shogo Hagino¹, Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (1.Osaka Univ.)

6:00 PM - 6:15 PM

△ [13p-A28-7] Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation II

〇(B)Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

6:15 PM - 6:30 PM

△ [13p-A28-8] Efficient second-harmonic generation by microwave plasma with metamaterial effect (II)

〇Akinori Iwai¹, Yoshihiro Nakamura¹, Osamu Sakai^1,² (1.Kyoto Univ., 2.Univ. Shiga Pref.)

6:30 PM - 6:45 PM

[13p-A28-9] Production of Atmospheric Pressure Line Plasma by Microwave

〇Hiroshi Miyata¹, Masato Uchida², Takeshi Yamaguchi¹, Haruo Shindo¹, Hiroshi Kuwahata¹, Masao Isomura¹ (1.Grad.Sch.,Tokai Univ., 2.Tokai Univ.)

6:45 PM - 7:00 PM

[13p-A28-10] Effect of Applying AC Cathode Bias in RF Magnetron Sputtering

〇Akimoto Takahiro¹, Shindo Haruo¹, Isomura Masao¹ (1.Tokai univ.)

Authentication

Password authentication.
Password is required to view the PDF. Please enter a password to authenticate.

The password has been sent to pre-registrants.
For onsite registrants, please refer to the official guidebook which will be distributed at the venue.
The password will be sent to all JSAP members in September 2015.

Please log in with your participant account.
» Participant Log In

▲