9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Toshio Seki2, Jiro Matsuo2, Satashi Hamaguchi1 (1.Osaka Univ., 2.Kyoto Univ.)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Toshio Seki2, Jiro Matsuo2, Satashi Hamaguchi1 (1.Osaka Univ., 2.Kyoto Univ.)
9:15 AM - 9:30 AM
〇Hu Li1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Nagahata Kazunori2, Tatsumi Tetsuya2, Hamaguchi Satoshi1 (1.Osaka Univ., 2.Sony Corporation)
9:30 AM - 9:45 AM
〇Cedric Thomas1, 4, Chang-Yong Lee1, Akio Higo2, Naofumi Okamoto3, Ichiro Yamashita3, 4, Seiji Samukawa1, 2, 4 (1.Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.Nara Inst. of Info. and Technol., 4.JST-CREST)
9:45 AM - 10:00 AM
〇Yusuke Fukunaga1, Takayoshi Tsutsumi1, Keigo Takeda1, Kenji Ishikawa1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
10:00 AM - 10:15 AM
〇(M1)Yuichi Murakami1, Michiro Isobe1, Keita Miyake1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony Corporation)
10:15 AM - 10:30 AM
〇Tomohiro Kubota1, Yoshiyuki Kikuchi1, Seiji Samukawa1, 2 (1.IFS, Tohoku Univ., 2.WPI-AIMR, Tohoku Univ.)
10:30 AM - 10:45 AM
〇(D)Nobuya Nakazaki1, Soma Sonobe1, Takumi Hatsuse1, Haruka Matsumoto1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
10:45 AM - 11:00 AM
〇(M1)haruka matsumoto1 (1.Kyoto Univ.)
Break (11:00 AM - 11:15 AM)
11:15 AM - 11:30 AM
〇Koji Eriguchi1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Kouichi Ono1 (1.Kyoto Univ., 2.Sony Corp.)
11:30 AM - 11:45 AM
〇(B)Yukimasa Okada1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
11:45 AM - 12:00 PM
〇Taro Ikeda1, Koji Eriguchi2, Akira Tanihara1, Nobuhiko Yamamoto1, Shigeru Kasai1, Kouichi Ono2 (1.Tokyo Electron Yamanashi Ltd., 2.Kyoto Univ.)
12:00 PM - 12:15 PM
〇Takaaki Iwai1, Koji Eriguchi3, Shohei Yamauchi2, Naotaka Noro1, Junichi Kitagawa1, Kouichi Ono3 (1.Tokyo Electron Yamanashi Ltd., 2.Tokyo Electron Ltd., 3.Kyoto Univ.)
12:15 PM - 12:30 PM
〇Tooru Aramaki1, Michikazu Morimoto1, Norihiko Ikeda1 (1.Hitach High-Tech)
12:30 PM - 12:45 PM
〇Taisei Motomura1, 2, Kazunori Takahashi3, Yuji Kasashima1, Fumihiko Uesugi1, Akira Ando3, Hisato Ogiso1, 2, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.AIST, 2.MINIMAL, 3.Tohoku Univ.)
12:45 PM - 1:00 PM
〇Yuji Kasashima1, Taisei Motomura1, Fumihiko Uesugi1 (1.AIST)
Password authentication.
Password is required to view the PDF. Please enter a password to authenticate.
The password has been sent to pre-registrants.
For onsite registrants, please refer to the official guidebook which will be distributed at the venue.
The password will be sent to all JSAP members in September 2015.
Please log in with your participant account.
» Participant Log In