9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Toshio Seki2, Jiro Matsuo2, Satashi Hamaguchi1 (1.Osaka Univ., 2.Kyoto Univ.)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Toshio Seki2, Jiro Matsuo2, Satashi Hamaguchi1 (1.Osaka Univ., 2.Kyoto Univ.)
9:15 AM - 9:30 AM
〇Hu Li1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Nagahata Kazunori2, Tatsumi Tetsuya2, Hamaguchi Satoshi1 (1.Osaka Univ., 2.Sony Corporation)
9:30 AM - 9:45 AM
〇Cedric Thomas1, 4, Chang-Yong Lee1, Akio Higo2, Naofumi Okamoto3, Ichiro Yamashita3, 4, Seiji Samukawa1, 2, 4 (1.Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.Nara Inst. of Info. and Technol., 4.JST-CREST)
9:45 AM - 10:00 AM
〇Yusuke Fukunaga1, Takayoshi Tsutsumi1, Keigo Takeda1, Kenji Ishikawa1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
10:00 AM - 10:15 AM
〇(M1)Yuichi Murakami1, Michiro Isobe1, Keita Miyake1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony Corporation)
10:15 AM - 10:30 AM
〇Tomohiro Kubota1, Yoshiyuki Kikuchi1, Seiji Samukawa1, 2 (1.IFS, Tohoku Univ., 2.WPI-AIMR, Tohoku Univ.)
10:30 AM - 10:45 AM
〇(D)Nobuya Nakazaki1, Soma Sonobe1, Takumi Hatsuse1, Haruka Matsumoto1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
10:45 AM - 11:00 AM
〇(M1)haruka matsumoto1 (1.Kyoto Univ.)
Break (11:00 AM - 11:15 AM)
11:15 AM - 11:30 AM
〇Koji Eriguchi1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Kouichi Ono1 (1.Kyoto Univ., 2.Sony Corp.)
11:30 AM - 11:45 AM
〇(B)Yukimasa Okada1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
11:45 AM - 12:00 PM
〇Taro Ikeda1, Koji Eriguchi2, Akira Tanihara1, Nobuhiko Yamamoto1, Shigeru Kasai1, Kouichi Ono2 (1.Tokyo Electron Yamanashi Ltd., 2.Kyoto Univ.)
12:00 PM - 12:15 PM
〇Takaaki Iwai1, Koji Eriguchi3, Shohei Yamauchi2, Naotaka Noro1, Junichi Kitagawa1, Kouichi Ono3 (1.Tokyo Electron Yamanashi Ltd., 2.Tokyo Electron Ltd., 3.Kyoto Univ.)
12:15 PM - 12:30 PM
〇Tooru Aramaki1, Michikazu Morimoto1, Norihiko Ikeda1 (1.Hitach High-Tech)
12:30 PM - 12:45 PM
〇Taisei Motomura1, 2, Kazunori Takahashi3, Yuji Kasashima1, Fumihiko Uesugi1, Akira Ando3, Hisato Ogiso1, 2, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.AIST, 2.MINIMAL, 3.Tohoku Univ.)
12:45 PM - 1:00 PM
〇Yuji Kasashima1, Taisei Motomura1, Fumihiko Uesugi1 (1.AIST)
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