Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Sat. Mar 14, 2015 9:00 AM - 12:00 PM A29 (6A-204)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
9:00 AM - 9:15 AM
〇Yuki Miyata1, Yasunori Nakamukai1, Cassia Tiemi Azevedo1, Yasushi Osikane1, Kentaro Kawai1, Kenta Arima1, Mizuho Morita1 (1.Osaka Univ.)
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9:15 AM - 9:30 AM
〇Takashi Matsukawa1, Kazuhiko Endo1, Hiroshi Akasaka2, Yasushi Kamiya2, Masayoshi Ikeda2, Koji Tsunekawa2, Takashi Nakagawa2, Yongxun Liu1, Meishoku Masahara1 (1.AIST, 2.Canon Anelva)
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9:30 AM - 9:45 AM
〇Motomu Degai1, Masanori Nakayama1, Kazuhiro Harada1, Hiroshi Ashihara1, Keniji Kanayama1 (1.Hitachi Kokusai Electric)
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9:45 AM - 10:00 AM
〇Kouta Takahashi1, Masashi Kurosawa1, 2, Hiroshi Ikenoue3, Shigehisa Shibayama1, 4, Mitsuo Sakashita1, Wakana Takeuchi1, Osamu Nakatsuka1, Shigeaki Zaima1, 5 (1.Grad. Sch. of Eng., Nagoya Univ., 2.JSPS Research Fellow (PD), 3.Grad. Sch. of ISEE, Kyushu Univ., 4.JSPS Research Fellow (DC), 5.EcoTopia Science Institute, Nagoya Univ)
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10:00 AM - 10:15 AM
〇Ryota Yoneda1, Keisuke Yamamoto2, Hiroshi Nakashima2 (1.IGSES, Kyushu Univ, 2.KASTEC, Kyushu Univ.)
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10:15 AM - 10:30 AM
〇Ryo Yokogawa1, Motohiro Tomita1, 3, Toshikazu Mizukoshi2, Takehiro Hirano2, Kenichiro Kusano2, Katsuhiro Sasaki2, Atsusi Ogura1 (1.Meiji Univ., 2.LAPIS Semiconductor Miyagi, 3.JSPS Research Fellow DC)
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Break (10:30 AM - 10:45 AM)
10:45 AM - 11:00 AM
〇YI CHEN1, TAKASHI NOGUCHI1, FULVIO MAZZAMUTO2, KARIM HUET2 (1.University of the Ryukyus, 2.SCREEN Semiconductor Solutions Co., Ltd.)
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11:00 AM - 11:15 AM
〇Hitoshi Asano1, Fumito Imura1, Kazuhiro Koga1, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.MINIMAL, 2.AIST)
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11:15 AM - 11:30 AM
〇Fumito Imura1, Shingo Ura2, Yuji Kitayama1, Kazuhiro Koga1, Hitoshi Asano1, Katsuhiko Nakato1, Sommawan Khumpuang1, 3, Shiro Hara1, 3 (1.MINIMAL, 2.Logic Research, 3.AIST)
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11:30 AM - 11:45 AM
〇Kazuhiro Koga1, Fumito Imura1, Hitoshi Asano1, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.Minimal Fab Development Association, 2.AIST)
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11:45 AM - 12:00 PM
〇Norio Umeyama1, Takashi Yajima1, Hitoshi Asano1, Fumito Imura1, Katsuhiko Nakato1, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.MINIMAL, 2.AIST)
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