The 62nd JSAP Spring Meeting, 2015

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Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[11a-A11-1~11] 3.7 Laser processing

Wed. Mar 11, 2015 9:30 AM - 12:30 PM A11 (6A-116)

11:15 AM - 11:30 AM

[11a-A11-7] Influence of ripple formation to submicron machining by a femto-second laser on Si surface

〇Takashi Yagi1, Ryo Sugawara1, Yuki Sone1, Shota Sekiguchi1, Shin Kadoi1, Ryusei Hayashi1 (1.Tokai Univ.)

Keywords:Si,ripple