[11a-A11-1~11] 3.7 Laser processing

[11a-A11-8] Investigation on ablation pattern of Si and Al formed by radially and azimuthally polarized Bessel beam

〇Takashi Yagi¹, Shota Sekiguchi¹, Yuki Sone¹, Ryo Sugawara¹, Shunichi Kitahara¹, Takashi Suzuki¹, Wataru Makino¹ (1.Tokai Univ.)

Keywords:Si,radial,Bessel