The 62nd JSAP Spring Meeting, 2015

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3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[11a-A14-1~13] 3.8 Optical measurement, instrumentation, and sensor

Wed. Mar 11, 2015 9:00 AM - 12:30 PM A14 (6A-103)

9:45 AM - 10:00 AM

[11a-A14-4] Improvement of the resolution of the thickness measurement of film using a terahertz pulse wave

〇Takanori Ochiai1, Kazuo Takahashi1 (1.Pioneer Corp.)

Keywords:measurements of film thickness,THz,FDTD