The 62nd JSAP Spring Meeting, 2015

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9 Applied Materials Science » 9.5 New functional materials and new phenomena

[11a-A20-1~7] 9.5 New functional materials and new phenomena

Wed. Mar 11, 2015 10:00 AM - 11:45 AM A20 (6A-212)

10:45 AM - 11:00 AM

[11a-A20-4] High Density Formation of Ta Nanodots Induced by Remote Hydrogen Plasma

〇Yapin Wan1, Katsunori Makihara1, Akio Ohta2, Daichi Takeuchi1, Seiichi Miyazaki1 (1.Nagoya Univ., 2.VBL. Nagoya Univ.)

Keywords:Ta,Remote Hydrogen Plasma,Nanodot