The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related techologies

[11a-A23-1~12] 13.5 Semiconductor devices and related techologies

Wed. Mar 11, 2015 9:00 AM - 12:15 PM A23 (6A-216)

9:00 AM - 9:15 AM

[11a-A23-1] High performance poly-Ge p- and n-MOSFETs fabricated by flash lamp annealing

〇Koji Usuda1, Yoshiki Kamata1, Yuuichi Kamimuta1, Takahiro Mori1, Masahiro Koike1, Tsutomu Tezuka1 (1.AIST-GNC)

Keywords:Ge,poly,MOSFET