The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

[11a-A27-1~13] 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

Wed. Mar 11, 2015 9:00 AM - 12:30 PM A27 (6A-202)

9:45 AM - 10:00 AM

△ [11a-A27-4] Evaluation of Anisotropic Biaxial Stress in Mesa-Shaped SiGe Nanostructure with High Ge Concentration

〇Shotaro Yamamoto1, Kazuma Takeuchi1, Motohiro Tomita1, 3, Daisuke Kosemura1, Koji Usuda2, Atsushi Ogura1 (1.Meiji Univ., 2.AIST-GNC, 3.JSPS Research Fellow DC)

Keywords:SiGe,strain,oil-immersion Raman spectroscopy