Minimal BOSCH Process

Hiroyuki Tanaka

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11a-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 9:00 AM - 12:30 PM A29 (6A-204)

11:30 AM - 11:45 AM

[11a-A29-10] Minimal BOSCH Process

〇Hiroyuki Tanaka¹, Yoshiki Shimizu^1,², Hisato Ogiso^1,², Shizuka Nakano^1,², Toshihiro Hayami³, Toshiya Miyazaki³, Kenichi Tomisaka³, Hisamitsu Tezen³, Sommawan Khumpuang^1,², Shiro Hara^1,² (1.MINIMAL, 2.AIST, 3.SPT)

Keywords:Minimalfab,BOSCH,MEMS

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