10:15 AM - 10:30 AM
△ [11a-B2-6] Development of EUV Polarizer System for Accurate Reflectance Measurement of an EUV collector mirror
Keywords:semiconductor,lithography,reflectometer
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[11a-B2-1~10] 7.3 Micro/Nano patterning and fabrication
Wed. Mar 11, 2015 9:00 AM - 11:45 AM B2 (6B-102)