[11a-C2-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

[11a-C2-11] Study on Chemical Properties of Cat-CVD SiNx/a-Si Stacked Passivation Layers Realizing Extremely Low Surface Recombination Velocity

〇Shigeki Terashima¹, Koichi Koyama¹, Keisuke Ohdaira¹, Hideki Matsumura¹ (1.Jpn. Adv. Inst. Sci&Tech.)

Keywords:passivation,heterojunction solar cells,Cat-CVD