[11a-D4-1~10] 12.3 Functional Materials and Novel Devices

[11a-D4-3] Study on the fast, high sensitive polyimide capacitive humidity sensors with carbon nanotube composite gas permeable top electrode and the analysis of water diffusion mechanism

〇Eiji Itoh¹, Akinori Takada¹ (1.Shinshu Univ.)

Keywords:polyimide,carbon nanotube,humidity sensor