[11a-D9-1~11] 6.5 Surface Physics, Vacuum

[11a-D9-4] Reconstruction in Atom Probe Tomography Considering the Shank Angle of Needle-Like Shaped Samples

〇Tsuyoshi Yukawa¹, Masato Morita¹, Masanobu Karasawa¹, Norihito Mayama³, Satoshi Ishimura³, Hiroshi Uchida³, Yoko Kawamura⁴, Kohei Itoh⁴, Masanori Owari^{1, 2} (1.IIS, The Univ. of Tokyo, 2.ESC, The Univ. of Tokyo, 3.Toshiba Nanoanalysis Co., 4.Keio Univ.)

Keywords:Atom Probe,Si isotope superlattice,Spatial Elemental Analysis