The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11a-P4-1~18] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

[11a-P4-17] Analysis of dissociative excitation reaction of organosilicon materials in microwave discharge flow of Ar.

〇(M1)Syunsuke Saeki1, Kumakura Motoki1, Ito Haruhiko1 (1.Nagaoka Univ. of Tech.)

Keywords:hydrogenated amorphous silicon carbide