[11a-P4-1~18] 6.2 Carbon-based thin films

[11a-P4-4] Fabrication of Periodic High-Quality Diamond Columns with ≈1-μm DiameterUsing Conventional Lithography Process and their Application to Particle Detector

〇Akito Shimizu¹, Osamu Maida¹, Toshimichi Ito¹ (1.Osaka Univ.)

Keywords:diamond