[11p-A11-1~14] 3.7 Laser processing

△ [11p-A11-14] Micro patterning on ZnO buffer layer by 4-beam interference laser irradiation and fabrication of ZnO micro/nano crystals

〇(DC)Tetsuya Shimogaki¹, Hirotaka Kawahara¹, Shihomi Nakao¹, Mitsuhiro Higashihata¹, Hiroshi Ikenoue¹, Daisuke Nakamura¹, Yoshiki Nakata², Tatsuo Okada¹ (1.Kyushu Univ., 2.Osaka Univ.)

Keywords:Zinc oxide,Interference laser processing,Nano/Micro crystals