[11p-A11-1~14] 3.7 Laser processing

△ [11p-A11-7] Local fluence dependence of exfoliated thin film shape on tungsten during femtosecond laser ablation

〇Rui Idutsu¹, Takashi Eyama¹, Naoya Kakimoto¹, Takuro Tomita¹, Noboru Hasegawa², Masaharu Nishikino², Yasuo Minami³, Motoyoshi Baba³, Tetsuya Kawachi², Mitsuru Yamagiwa², Tohru Suemoto³ (1.STS Tokushima Univ., 2.QBSC JAEA, 3.ISSP The Univ. of Tokyo)

Keywords:femtosecond laser,fluence dependence