[11p-A14-1~15] 3.8 Optical measurement, instrumentation, and sensor

[11p-A14-12] A novel digital phasemeter for heterodyne laser interferometers

〇Wataru Kokuyama¹, Hideaki Nozato¹, Akihiro Ota¹ (1.NMIJ/AIST)

Keywords:laser heterodyne interferometer,phasemeter