The 62nd JSAP Spring Meeting, 2015

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Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[11p-A16-1~11] 3.15 Silicon photonics

Wed. Mar 11, 2015 2:00 PM - 5:00 PM A16 (6A-206)

3:45 PM - 4:00 PM

[11p-A16-7] Spot Size Convertors Using Anisotropic Etching of Single-Crystal Silicon

〇Satoshi Miyamura1, Hideki Ono1, Yutaka Okabe1, Yousuke Oonawa1, Hiroki Yaegashi1, Tsuyoshi Horikawa1, 2, Naoki Hirayama2, Hironori Sasaki1 (1.PETRA, 2.AIST)

Keywords:Si wire waveguide,spot size convertor,polarization independent