The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[11p-A21-1~12] 13.8 Compound and power electron devices and process technology

Wed. Mar 11, 2015 2:00 PM - 5:15 PM A21 (6A-213)

2:00 PM - 2:15 PM

[11p-A21-1] Ohmic Electrode Formation for Diamond Semiconductors Using Ar Ion Beam Irradiation

〇Yuhei Seki1, Yasusi Hoshino1, Yasunao Saito1, Jyoji Nakata1 (1.Kanagawa Univ.)

Keywords:Diamond semiconductor,Ohmic electrode