The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related techologies

[11p-A23-1~13] 13.5 Semiconductor devices and related techologies

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A23 (6A-216)

2:00 PM - 2:15 PM

[11p-A23-1] Experimental Study on 2D-Si Layers for Future Several-nm CMOS (X)

〇Yuya Suzuki1, Yoshiki Nagamine1, Takashi Aoki1, Tomohisa Mizuno1, Taturo Maeda2 (1.Kanagawa Univ., 2.AIST)

Keywords:semiconductor