[11p-A23-1~13] 13.5 Semiconductor devices and related techologies

[11p-A23-3] Fabrication method for coupled series-triple quantum dots using pattern-dependent oxidation

〇Takahumi Uchida¹, Isamu Yoshioka¹, Hikaru Satoh¹, Atsushi Tsurumaki-Fukuchi¹, Masashi Arita¹, Akira Fujiwara², Yasuo Takahashi¹ (1.IST. Hokkaido Univ., 2.NTT-BRL.)

Keywords:Silicon,Quantum dot