The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related techologies

[11p-A23-1~13] 13.5 Semiconductor devices and related techologies

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A23 (6A-216)

3:00 PM - 3:15 PM

[11p-A23-5] Dopat Atom MOSFET by Low-concentration Phosphorus Doping

〇Yuki Takasu1, Moraru Daniel2, Takeshi Mizuno1, Michiharu Tabe1 (1.RIE, Shizuoka Univ., 2.Shizuoka Univ.)

Keywords:Si,MOSFET,dopant