The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[11p-A26-1~16] 7.1 X-ray technologies

Wed. Mar 11, 2015 1:15 PM - 5:30 PM A26 (6A-201)

3:30 PM - 3:45 PM

△ [11p-A26-9] Sub-nm Accuracy Wave Front Measurement of EUV Imaging Objective by Using Point Diffraction Interferometer

〇ryou Sunayama1, Mitsunori Toyoda1, Mihiro Yanagihara1 (1.IMRAM, Tohoku Univ.)

Keywords:EUV microscopy,interferometry