The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

2:15 PM - 2:30 PM

[11p-A29-2] Electronic Skin with high selectivity against a bending of a substrate

〇Kenichiro Kanao1, Shingo Harada1, Yuki Yamamoto1, Wataru Honda1, Takayuki Arie1, Seiji Akita1, Kuniharu Takei1 (1.Osaka Pref. Univ.)

Keywords:Electronic Skin