The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

3:15 PM - 3:30 PM

[11p-A29-6] Optical Response of Micromechanical Infrared Thermal Detector

〇(PC)Jonghyeon Jeong1, Shinya Kumagai1, 3, Ichiro Yamashita2, 3, Yukiharu Uraoka2, 3, Minoru Sasaki1, 3 (1.Toyota Technological Institute, 2.Nara Institute of Science and Technology, 3.CREST JST)

Keywords:MEMS,infrared,sensor