The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[11p-A29-1~13] 13.4 Si wafer processing /MEMS/Integration technology

Wed. Mar 11, 2015 2:00 PM - 5:30 PM A29 (6A-204)

4:15 PM - 4:30 PM

[11p-A29-9] Textile Electrode for Wearable Breathing Sensor Based on Capacitance Detection

Makie Terasawa1, Shinya Kumagai1, 〇Minoru Sasaki1 (1.Toyota Tech. Inst.)

Keywords:Breathing Sensor,Wearable Device,Capacitance Detection