1:15 PM - 1:45 PM
[11p-B2-1] [INVITED] Nanoimprint process using condensable gas PFP
Keywords:nanoimprint,pentafluoropropane,PFP
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[11p-B2-1~11] 7.3 Micro/Nano patterning and fabrication
Wed. Mar 11, 2015 1:15 PM - 4:30 PM B2 (6B-102)