The 62nd JSAP Spring Meeting, 2015

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Symposium » State of the art technology in electron and focused-ion-beam apparatuses

[11p-B3-1~9] State of the art technology in electron and focused-ion-beam apparatuses

Wed. Mar 11, 2015 1:15 PM - 5:15 PM B3 (6B-103)

1:15 PM - 1:30 PM

[11p-B3-1] Introductory Talk: Applications of Charged Particle Beams to Industry

〇Gikan Takaoka1 (1.Kyoto Univ.)

Keywords:Charged Particle,Electron Beam,Ion Beam