5:00 PM - 5:15 PM
[11p-B3-9] Development of Ionic Liquid Ion Source and its Irradiation Effects on Solid Surface for Metal-Free and Reactive Negative Ion FIB
Keywords:Ionic Liquid,Ion Source
Presentation information
Symposium
Symposium » State of the art technology in electron and focused-ion-beam apparatuses
[11p-B3-1~9] State of the art technology in electron and focused-ion-beam apparatuses
Wed. Mar 11, 2015 1:15 PM - 5:15 PM B3 (6B-103)