The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Symposium

Symposium » Advanced CMOS Technology and Its Future Scope

[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

Wed. Mar 11, 2015 1:15 PM - 5:30 PM B5 (6B-105)

4:30 PM - 5:00 PM

[11p-B5-8] High-k Metal Gate Process Technology and Challenges for 10 nm and Beyond

〇Naomi Yoshida1, Adam Brand1 (1.Applied Materials)

Keywords:Metal Gate,High-k,FinFET