The 62nd JSAP Spring Meeting, 2015

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.7 Ultrasonic

[11p-D12-1~15] 1.7 Ultrasonic

Wed. Mar 11, 2015 1:15 PM - 5:15 PM D12 (16-501)

4:30 PM - 4:45 PM

[11p-D12-13] Sensitivity of Ball SAW Trace Moisture Sensor using Sol-gel SiOx film in Gas Flow of Low Flow Rate

〇Toshihiro Tsuji1, Kei Watanabe1, Yusuke Higashide1, Toru Oizumi1, Nobuo Takeda1, Shingo Akao1, Yusuke Tsukahara1, Kazushi Yamanaka1 (1.Tohoku Univ.)

Keywords:surface acoustic wave sensor,Trace moisture,amorphous silica