The 62nd JSAP Spring Meeting, 2015

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[11p-D13-1~13] 1.3 Novel technologies and interdisciplinary engineering

Wed. Mar 11, 2015 1:15 PM - 5:00 PM D13 (16-502)

1:15 PM - 1:45 PM

[11p-D13-1] [INVITED] Detection properties of VOx microbolometer devices fabricated by MOD

〇Takashi Uchida1, Takashi Tachiki1 (1.National Defense Academy)

Keywords:metal-organic decomposition,VOx,bolometer detectors