The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[11p-D13-1~13] 1.3 Novel technologies and interdisciplinary engineering

Wed. Mar 11, 2015 1:15 PM - 5:00 PM D13 (16-502)

3:00 PM - 3:15 PM

[11p-D13-6] Microfabrication of polystyrene quadrupole by top-down and bottom-up approach

〇Tsuyoshi Takahashi1, Akihiro Matsutani2, Dai Shoji2, Kunio Nishioka2, Mina Sato2, Toshihiro Isobe1, Akira Nakajima1, Sachiko Matsushita1 (1.Tokyo Tech., 2.MEMS, Tokyo Tech.)

Keywords:Self-assembly,Lithography,Spherical microparticles