The 62nd JSAP Spring Meeting, 2015

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Symposium » Fabrication and characterization of nano-structures prepared with advanced shadowing deposition systems

[11p-D9-1~7] Fabrication and characterization of nano-structures prepared with advanced shadowing deposition systems

Wed. Mar 11, 2015 1:15 PM - 5:00 PM D9 (16-304)

1:15 PM - 2:00 PM

[11p-D9-1] Technology for Nanomorphological Control -- Recent Progress and Future Challenges

〇Motofumi Suzuki1 (1.Kyoto Univ.)

Keywords:physical self-assemble,shadowing,oblique angle deposition